Invention Grant
US08154085B2 Nonvolatile semiconductor memory has resistors including electrode layer formed on low resistance layer adjacent to mask film
失效
非易失性半导体存储器具有包括邻近掩模膜的低电阻层上形成的电极层的电阻器
- Patent Title: Nonvolatile semiconductor memory has resistors including electrode layer formed on low resistance layer adjacent to mask film
- Patent Title (中): 非易失性半导体存储器具有包括邻近掩模膜的低电阻层上形成的电极层的电阻器
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Application No.: US11749956Application Date: 2007-05-17
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Publication No.: US08154085B2Publication Date: 2012-04-10
- Inventor: Shigeru Ishibashi
- Applicant: Shigeru Ishibashi
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2006-139353 20060518
- Main IPC: H01L29/788
- IPC: H01L29/788 ; H01L27/06

Abstract:
A nonvolatile semiconductor memory includes memory cell transistors and resistors. Each memory cell transistor has source/drain diffusion layers provided in a semiconductor substrate, a first gate insulating film located between the source/drain diffusion layers, a floating gate electrode layer located on the first gate insulating film, a first inter-gate insulating film located on the floating gate electrode layer, a control gate electrode layer located on the first inter-gate insulating layer, and a first low-resistance layer located on the control gate electrode layer. Each resistor has a second gate insulating film located on the semiconductor substrate, a first electrode layer located on the second gate insulating film, a second inter-gate insulating film located on the first electrode layer, a second electrode layer located on the second inter-gate insulating film, a second low-resistance layer located on the second electrode layer, and a contact plug connected to the second low-resistance layer.
Public/Granted literature
- US20070267685A1 NONVOLATILE SEMICONDUCTOR MEMORY AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2007-11-22
Information query
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