Invention Grant
US08154115B1 Package structure having MEMS element and fabrication method thereof
有权
具有MEMS元件的封装结构及其制造方法
- Patent Title: Package structure having MEMS element and fabrication method thereof
- Patent Title (中): 具有MEMS元件的封装结构及其制造方法
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Application No.: US13024672Application Date: 2011-02-10
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Publication No.: US08154115B1Publication Date: 2012-04-10
- Inventor: Chang-Yueh Chan , Chien-Ping Huang , Chun-Chi Ke , Shih-Kuang Chiu
- Applicant: Chang-Yueh Chan , Chien-Ping Huang , Chun-Chi Ke , Shih-Kuang Chiu
- Applicant Address: TW Taichung
- Assignee: Siliconware Precision Industries Co., Ltd.
- Current Assignee: Siliconware Precision Industries Co., Ltd.
- Current Assignee Address: TW Taichung
- Agency: Edwards Wildman Palmer LLP
- Agent Peter F. Corless; Steven M. Jensen
- Priority: TW99144690A 20101217
- Main IPC: H01L23/12
- IPC: H01L23/12

Abstract:
A package structure having an MEMS element includes: a chip having at least an MEMS element and a plurality of first conductive pads; a lid disposed on the chip to cover the MEMS element and having a plurality of second conductive pads formed thereon; a plurality of bonding wires electrically connecting the first and second conductive pads; a plurality of first bumps disposed on the second conductive pads, respectively; an encapsulant formed on the chip to encapsulate the lid, the bonding wires, the first and second conductive pads and the first bumps while exposing the top surfaces of the first bumps; and a plurality of circuits formed on the encapsulant and electrically connecting to the exposed first bumps, thereby avoiding the conventional drawback of electrical connection failure caused by position deviation of bonding wires due to mold flow of the encapsulant.
Information query
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