Invention Grant
US08154119B2 Compliant spring interposer for wafer level three dimensional (3D) integration and method of manufacturing 有权
适用于晶圆级三维(3D)集成和制造方法的弹簧插入器

Compliant spring interposer for wafer level three dimensional (3D) integration and method of manufacturing
Abstract:
The present invention is an apparatus for integrating multiple devices. The apparatus includes a substrate having a first via and a second via, a semiconductor chip positioned on a top portion of the substrate and positioned between the first via and the second via, first and second bumps positioned on the semiconductor chip, and an interposer wafer having a first interposer spring assembly and a second interposer spring assembly, the first interposer spring assembly having a first interposer spring and a first electrical connection attached to the first interposer spring, and the second interposer spring assembly having a second interposer spring and a second electrical connection attached to the second interposer spring.
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