Invention Grant
US08154277B2 Method and apparatus for measuring the thickness of a metal layer provided on a metal object 有权
用于测量设置在金属物体上的金属层的厚度的方法和装置

Method and apparatus for measuring the thickness of a metal layer provided on a metal object
Abstract:
A method and an apparatus for measuring the thickness of a metal layer. The metal layer has a resistivity (ρ1) that differs from the resistivity (ρ2) of the metal object. The apparatus includes a first device arranged to generate a magnetic field in close vicinity of the metal layer, and to generate a variation of the magnetic field so that a current is induced in the surface of the metal layer, a second device arranged to measure the changes of the magnetic field outside the metal layer due to the induced current during a time period that is longer than the time it takes for the current to propagate through the metal layer, and a computing unit to determine the thickness of the layer based on a mathematical relation between the thickness of the layer and the measured values of the changes of the magnetic field.
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