Invention Grant
US08154735B2 Apparatus for measuring quasi-static error of rotation driving shaft 有权
用于测量旋转驱动轴的准静态误差的装置

Apparatus for measuring quasi-static error of rotation driving shaft
Abstract:
In an apparatus for measuring a quasi-static error of a rotation driving shaft, a positional error and an angular error in each of X, Y, and Z axis directions during rotation of a driving shaft is measured by means of a single measurement apparatus. In the apparatus, a first splitter, a second splitter, and a reflector spectrally output or reflect a laser beam, which is output from a laser driving device, to a first position sensor and a second position sensor, so that it is possible to obtain every error information on positional errors and angular errors in X, Y, and Z axis directions of a rotation driving shaft through input position change data of the inputted laser beam.
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