A method is disclosed for forming a photonic crystal in a homogeneous layer of material. The method enables the fabrication of 1D, 2D, or 3D photonic crystals. Photonic crystals in accordance with embodiments of the present invention exhibit low temperature sensitivity and low device curvature. In some embodiments, photonic crystals in accordance with embodiments of the present invention are integrated with mechanical elements, such as micromechanical, nanomechanical, microelectronic, and microfluidics devices and systems.