Invention Grant
- Patent Title: Method of manufacturing photomask
- Patent Title (中): 制造光掩模的方法
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Application No.: US12188198Application Date: 2008-08-07
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Publication No.: US08156451B2Publication Date: 2012-04-10
- Inventor: Yoshikazu Nagamura , Shogo Narukawa
- Applicant: Yoshikazu Nagamura , Shogo Narukawa
- Applicant Address: JP Kawasaki-shi JP Tokyo
- Assignee: Renesas Electronics Corporation,Dai Nippon Printing Co., Ltd.
- Current Assignee: Renesas Electronics Corporation,Dai Nippon Printing Co., Ltd.
- Current Assignee Address: JP Kawasaki-shi JP Tokyo
- Agency: Miles & Stockbridge P.C.
- Priority: JP2007-239303 20070914; JP2008-175491 20080704
- Main IPC: G06F17/50
- IPC: G06F17/50 ; G06F19/00

Abstract:
A technique for quantitatively expressing a manufacturing difficulty level of a photomask and for efficiently manufacturing the photomask is provided. A mask manufacturing difficulty level different for each mask layout, product, and mask layer is relatively recognized with a mask manufacturing load index calculated by a mask manufacturing load prediction system, and when layout correction is possible, the final layout is corrected to a layout with a low difficulty level, and a mask ordering party provides a mask manufacturer with information regarding the mask manufacturing difficulty level in an early stage. The mask manufacturing load index is expressed with a defect guarantee load index and a lithography load index.
Public/Granted literature
- US20090077524A1 METHOD OF MANUFACTURING PHOTOMASK Public/Granted day:2009-03-19
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