Invention Grant
US08163143B2 Al-Ni-La-Si system Al-based alloy sputtering target and process for producing the same
有权
Al-Ni-La-Si系Al基合金溅射靶及其制造方法
- Patent Title: Al-Ni-La-Si system Al-based alloy sputtering target and process for producing the same
- Patent Title (中): Al-Ni-La-Si系Al基合金溅射靶及其制造方法
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Application No.: US12172442Application Date: 2008-07-14
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Publication No.: US08163143B2Publication Date: 2012-04-24
- Inventor: Katsutoshi Takagi , Yuki Iwasaki , Masaya Ehira , Akira Nanbu , Mototaka Ochi , Hiroshi Goto , Nobuyuki Kawakami
- Applicant: Katsutoshi Takagi , Yuki Iwasaki , Masaya Ehira , Akira Nanbu , Mototaka Ochi , Hiroshi Goto , Nobuyuki Kawakami
- Applicant Address: JP Kobe-shi JP Kobe-shi
- Assignee: Kobe Steel, Ltd.,Kobelco Research Institute, Inc.
- Current Assignee: Kobe Steel, Ltd.,Kobelco Research Institute, Inc.
- Current Assignee Address: JP Kobe-shi JP Kobe-shi
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2007-192214 20070724
- Main IPC: C23C14/00
- IPC: C23C14/00

Abstract:
The present invention relates to an Al—Ni—La—Si system Al-based alloy sputtering target including Ni, La and Si, in which, when a section from (¼)t to (¾)t (t: thickness) in a cross section vertical to a plane of the sputtering target is observed with a scanning electron microscope at a magnification of 2000 times, (1) a total area of an Al—Ni system intermetallic compound having an average particle diameter of 0.3 μm to 3 μm with respect to a total area of the entire Al—Ni system intermetallic compound is 70% or more in terms of an area fraction, the Al—Ni system intermetallic compound being mainly composed of Al and Ni; and (2) a total area of an Al—Ni—La—Si system intermetallic compound having an average particle diameter of 0.2 μm to 2 μm with respect to a total area of the entire Al—Ni—La—Si system intermetallic compound is 70% or more in terms of an area fraction, the Al—Ni—La—Si system intermetallic compound being mainly composed of Al, Ni, La, and Si.
Public/Granted literature
- US20090026072A1 AL-NI-LA-SI SYSTEM AL-BASED ALLOY SPUTTERING TARGET AND PROCESS FOR PRODUCING THE SAME Public/Granted day:2009-01-29
Information query
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