Invention Grant
- Patent Title: Mask for crystallizing a semiconductor layer and method of crystallizing a semiconductor layer using the same
- Patent Title (中): 用于使半导体层结晶的掩模和使用其使半导体层结晶的方法
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Application No.: US12321985Application Date: 2009-01-27
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Publication No.: US08163444B2Publication Date: 2012-04-24
- Inventor: Cheol-Ho Park
- Applicant: Cheol-Ho Park
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Innovation Counsel LLP
- Priority: KR10-2008-0012694 20080212
- Main IPC: G03F1/00
- IPC: G03F1/00 ; C30B25/12

Abstract:
A mask for crystallizing a semiconductor layer includes a plurality of first main-slit portions, a plurality of second main-slit portions, upper slit portion and lower slit portion. The first main-slit portions extend along an inclined direction with respect to a first direction. The second main-slit portions are spaced apart from the first main-slit portions. The upper slit portion is disposed on the first main-slit portions along a second direction to be parallel to the first main-slit portions, and extends partway over the second main-slit portions to be longer than the first main-slit portions. The lower slit portion is disposed under the second main-slit portions along the second direction to be parallel to the second main-slit portions, and extends partway under the first main-slit portions to be longer than the second main-slit portions.
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