Invention Grant
US08163444B2 Mask for crystallizing a semiconductor layer and method of crystallizing a semiconductor layer using the same 有权
用于使半导体层结晶的掩模和使用其使半导体层结晶的方法

Mask for crystallizing a semiconductor layer and method of crystallizing a semiconductor layer using the same
Abstract:
A mask for crystallizing a semiconductor layer includes a plurality of first main-slit portions, a plurality of second main-slit portions, upper slit portion and lower slit portion. The first main-slit portions extend along an inclined direction with respect to a first direction. The second main-slit portions are spaced apart from the first main-slit portions. The upper slit portion is disposed on the first main-slit portions along a second direction to be parallel to the first main-slit portions, and extends partway over the second main-slit portions to be longer than the first main-slit portions. The lower slit portion is disposed under the second main-slit portions along the second direction to be parallel to the second main-slit portions, and extends partway under the first main-slit portions to be longer than the second main-slit portions.
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