Invention Grant
- Patent Title: Method of initiating molecular bonding
- Patent Title (中): 开始分子键合的方法
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Application No.: US12936639Application Date: 2009-08-06
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Publication No.: US08163570B2Publication Date: 2012-04-24
- Inventor: Arnaud Castex , Marcel Broekaart
- Applicant: Arnaud Castex , Marcel Broekaart
- Applicant Address: FR Bernin
- Assignee: Soitec
- Current Assignee: Soitec
- Current Assignee Address: FR Bernin
- Agency: TraskBritt
- Priority: FR0855767 20080828
- International Application: PCT/EP2009/060250 WO 20090806
- International Announcement: WO2010/023082 WO 20100304
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/30

Abstract:
A method of initiating molecular bonding, comprising bringing one face of a first wafer to face one face of a second wafer and initiating a point of contact between the two facing faces. The point of contact is initiated by application to one of the two wafers, for example, using a bearing element of a tool, of a mechanical pressure in the range from 0.1 MPa to 33.3 MPa.
Public/Granted literature
- US20110045611A1 METHOD OF INITIATING MOLECULAR BONDING Public/Granted day:2011-02-24
Information query
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