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US08163570B2 Method of initiating molecular bonding 失效
开始分子键合的方法

  • Patent Title: Method of initiating molecular bonding
  • Patent Title (中): 开始分子键合的方法
  • Application No.: US12936639
    Application Date: 2009-08-06
  • Publication No.: US08163570B2
    Publication Date: 2012-04-24
  • Inventor: Arnaud CastexMarcel Broekaart
  • Applicant: Arnaud CastexMarcel Broekaart
  • Applicant Address: FR Bernin
  • Assignee: Soitec
  • Current Assignee: Soitec
  • Current Assignee Address: FR Bernin
  • Agency: TraskBritt
  • Priority: FR0855767 20080828
  • International Application: PCT/EP2009/060250 WO 20090806
  • International Announcement: WO2010/023082 WO 20100304
  • Main IPC: H01L21/00
  • IPC: H01L21/00 H01L21/30
Method of initiating molecular bonding
Abstract:
A method of initiating molecular bonding, comprising bringing one face of a first wafer to face one face of a second wafer and initiating a point of contact between the two facing faces. The point of contact is initiated by application to one of the two wafers, for example, using a bearing element of a tool, of a mechanical pressure in the range from 0.1 MPa to 33.3 MPa.
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