Invention Grant
US08163579B2 Method of manufacturing substrate for forming device, and method of manufacturing nitride-based semiconductor laser diode 有权
用于形成装置的基板的制造方法以及制造氮化物基半导体激光二极管的方法

Method of manufacturing substrate for forming device, and method of manufacturing nitride-based semiconductor laser diode
Abstract:
Provided is a method of manufacturing a semiconductor laser diode. The method includes the steps of: preparing a GaN substrate having an a-plane or m-plane GaN layer formed thereon; forming a plurality of laser diode structures on the GaN layer; etching the GaN substrate such that a cutting reference line is formed in a groove shape along the crystal surface of the a-plane or m-plane, not a main plane; and cutting the GaN substrate along the cutting reference line so as to form a mirror surface of the semiconductor laser diode, the mirror surface coinciding with the crystal surface of the a-plane or m-plane, not the main plane.
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