Invention Grant
- Patent Title: Transmitting optical element with low foreign-element contamination
- Patent Title (中): 传输低外来元素污染的光学元件
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Application No.: US12488059Application Date: 2009-06-19
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Publication No.: US08163667B2Publication Date: 2012-04-24
- Inventor: Wilfried Clauss
- Applicant: Wilfried Clauss
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Sughrue Mion, PLLC
- Priority: DE102006061848 20061221
- Main IPC: C04B35/04
- IPC: C04B35/04 ; C04B35/03 ; C04B35/50 ; C04B35/51

Abstract:
A transmitting optical element of polycrystalline material that includes crystallites of magnesium spinel MgAl2O4 or lutetium-aluminum garnet Lu3Al5O12, wherein the polycrystalline material includes an average total concentration of foreign element contamination caused by Y, Sc, Co, Ni, Zr, Mo, Sn and/or Nb of less than 50 ppm, preferably of less than 20 ppm, and more preferably of less than 15 ppm.
Public/Granted literature
- US20090251673A1 TRANSMITTING OPTICAL ELEMENT WITH LOW FOREIGN-ELEMENT CONTAMINATION Public/Granted day:2009-10-08
Information query
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