Invention Grant
- Patent Title: Beam irradiation device
- Patent Title (中): 光束照射装置
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Application No.: US12729587Application Date: 2010-03-23
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Publication No.: US08164078B2Publication Date: 2012-04-24
- Inventor: Yoshiaki Maeno , Mitsutaka Yamaguchi
- Applicant: Yoshiaki Maeno , Mitsutaka Yamaguchi
- Applicant Address: JP Osaka JP Tokyo
- Assignee: Sanyo Electric Co., Ltd.,Sanyo Optec Design Co., Ltd.
- Current Assignee: Sanyo Electric Co., Ltd.,Sanyo Optec Design Co., Ltd.
- Current Assignee Address: JP Osaka JP Tokyo
- Agency: Ditthavong Mori & Steiner, P.C.
- Priority: JP2009-077740 20090326
- Main IPC: G01J1/32
- IPC: G01J1/32 ; G01C3/08

Abstract:
A beam irradiation device includes a photodetector which receives servo light; a signal processing section which generates a position detection signal based on a detection signal from the photodetector; and a control section which controls the laser light source and the actuator for beam scanning based on the position detection signal. The signal processing section performs a sampling operation with respect to the detection signal from the photodetector at two consecutive sampling timings. The signal processing section includes an A/D converting section which converts a difference between two sampling values obtained by the sampling operation into a digital signal, and a computing section which computes the position detection signal based on the digital signal from the A/D converting section.
Public/Granted literature
- US20100243861A1 BEAM IRRADIATION DEVICE Public/Granted day:2010-09-30
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