Invention Grant
US08164231B2 Electret device comprising electret film formed on main surface of substrate and electrostatic operating apparatus 有权
驻极体装置包括在基板的主表面上形成的驻极体膜和静电操作装置

  • Patent Title: Electret device comprising electret film formed on main surface of substrate and electrostatic operating apparatus
  • Patent Title (中): 驻极体装置包括在基板的主表面上形成的驻极体膜和静电操作装置
  • Application No.: US11936542
    Application Date: 2007-11-07
  • Publication No.: US08164231B2
    Publication Date: 2012-04-24
  • Inventor: Katsuji Mabuchi
  • Applicant: Katsuji Mabuchi
  • Applicant Address: JP Osaka
  • Assignee: Sanyo Electric Co., Ltd.
  • Current Assignee: Sanyo Electric Co., Ltd.
  • Current Assignee Address: JP Osaka
  • Agency: Ditthavong Mori & Steiner, P.C.
  • Priority: JP2006-305615 20061110; JP2007-268195 20071015
  • Main IPC: H02N1/00
  • IPC: H02N1/00
Electret device comprising electret film formed on main surface of substrate and electrostatic operating apparatus
Abstract:
An electret device includes a substrate formed with a plurality of recess portions on a main surface thereof and an electret film so formed on the main surface of the substrate as to cover at least inner surfaces of the recess portions.
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