Invention Grant
US08164735B2 Regulating device, exposure apparatus and device manufacturing method
失效
调节装置,曝光装置和装置的制造方法
- Patent Title: Regulating device, exposure apparatus and device manufacturing method
- Patent Title (中): 调节装置,曝光装置和装置的制造方法
-
Application No.: US12397014Application Date: 2009-03-03
-
Publication No.: US08164735B2Publication Date: 2012-04-24
- Inventor: Yoshiyuki Okada
- Applicant: Yoshiyuki Okada
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon USA Inc IP Division
- Priority: JP2008-052668 20080303
- Main IPC: G03B27/32
- IPC: G03B27/32 ; G03B27/52 ; G05D23/00

Abstract:
The present invention is a regulating device configured to regulate a temperature T2 of a first medium in accordance with a target temperature. The regulating device comprises a heat exchanger 16, a control valve 14, temperature sensors 2 and 4, temperature sensors 6 and 8, and a heat quantity control unit 30 and a temperature control unit 50 configured to calculate a target exchange heat quantity in the heat exchanger 16, calculate an exchange heat quantity in the heat exchanger 16, add a signal dependent upon a difference between the target exchange heat quantity and the exchange heat quantity to a signal dependent upon a difference between an output of the temperature sensor 4 and the target temperature, and control the control valve 14 so that a difference between the output of the temperature sensor 4 and the target temperature is reduced.
Public/Granted literature
- US20090218088A1 REGULATING DEVICE, EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD Public/Granted day:2009-09-03
Information query