Invention Grant
US08164821B2 Microelectromechanical device with thermal expansion balancing layer or stiffening layer 失效
具有热膨胀平衡层或加强层的微机电装置

Microelectromechanical device with thermal expansion balancing layer or stiffening layer
Abstract:
An interferometric modulating device is provided with a thermal expansion balancing layer on a side of the movable flexible layer opposite the movable reflector such that when temperature changes the distance between the movable reflector and the optical stack does not change significantly, thereby leading to stable color. Additionally, an interferometric modulating device is provided with a stiffening layer between the movable flexible layer and the movable reflector and at least one hollow void exists on the surface where the movable reflector and the stiffening layer contact each other so that the movable reflector is more rigid to bending, thereby reducing the temperature sensitivity of the movable reflector.
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