Invention Grant
- Patent Title: Defect classification
- Patent Title (中): 缺陷分类
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Application No.: US10716757Application Date: 2003-11-19
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Publication No.: US08165384B1Publication Date: 2012-04-24
- Inventor: Weimin Ma , Carl E. Hess
- Applicant: Weimin Ma , Carl E. Hess
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Luedeka Neely Group, P.C.
- Main IPC: G06K9/00
- IPC: G06K9/00
Abstract:
A method for classifying images from a set of test images, including comparing each of the test images to reference images. Each of the test images is grouped with one of the reference images. All of the images in each group can be classified with a single classification.
Information query
