Invention Grant
- Patent Title: Angular velocity sensor element
- Patent Title (中): 角速度传感器元件
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Application No.: US12382274Application Date: 2009-03-12
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Publication No.: US08166815B2Publication Date: 2012-05-01
- Inventor: Kenichi Tochi , Takao Noguchi , Ken Unno , Kazuya Maekawa
- Applicant: Kenichi Tochi , Takao Noguchi , Ken Unno , Kazuya Maekawa
- Applicant Address: JP Tokyo
- Assignee: TDK Corporation
- Current Assignee: TDK Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2008-085277 20080328
- Main IPC: G01C19/56
- IPC: G01C19/56

Abstract:
An angular velocity sensor element is provided which is capable of preventing even transmission of sudden externally-applied vibration to an element portion by absorbing the vibration. An angular velocity sensor element 2 according to the present embodiment has a fixing portion 21 in the form of a frame, an element portion 20 disposed in the frame of the fixing portion 21 and having vibrating arms 21 to 24 in a drive system and a detection system, and a connecting portion 25 formed as a fixed-fixed beam having its both ends connected to the fixing portion 21 and having its intermediate portion connected to the element portion 20.
Public/Granted literature
- US20090260436A1 Angular velocity sensor element Public/Granted day:2009-10-22
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