Invention Grant
US08166818B2 Using pole pieces to guide magnetic flux through a MEMS device and method of making
有权
使用极片引导磁通量通过MEMS器件和制造方法
- Patent Title: Using pole pieces to guide magnetic flux through a MEMS device and method of making
- Patent Title (中): 使用极片引导磁通量通过MEMS器件和制造方法
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Application No.: US12471785Application Date: 2009-05-26
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Publication No.: US08166818B2Publication Date: 2012-05-01
- Inventor: Paul W. Dwyer , Ryan Roehnelt
- Applicant: Paul W. Dwyer , Ryan Roehnelt
- Applicant Address: US NJ Morristown
- Assignee: Honeywell International Inc.
- Current Assignee: Honeywell International Inc.
- Current Assignee Address: US NJ Morristown
- Agency: Lowe Graham Jones
- Main IPC: G01P15/08
- IPC: G01P15/08

Abstract:
A translational, Micro-Electro-Mechanical System (MEMS) accelerometer device with precisely formed pole pieces to guide magnetic flux through a coil in a MEMS device layer. An example device includes a device layer, a magnetic return path component attached to a first side of the device layer, and a magnet unit attached to a second side of the device layer. The device layer includes a proof mass with electrically conductive trace and frame components. The magnet unit includes two magnetically conductive posts (formed of a ferrous material) located proximate to the trace, a base section formed of the same material as the posts, a non-magnetically conductive post (formed of a glass substrate) connected between the conductive posts, and a magnet attached to the non-magnetically conductive post within a cavity formed in the base section between the two magnetically conductive posts.
Public/Granted literature
- US20100242601A1 USING POLE PIECES TO GUIDE MAGNETIC FLUX THROUGH A MEMS DEVICE AND METHOD OF MAKING Public/Granted day:2010-09-30
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