Invention Grant
- Patent Title: Substrate transport apparatus with active edge gripper
- Patent Title (中): 带主动边缘夹具的基板输送装置
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Application No.: US11093481Application Date: 2005-03-30
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Publication No.: US08167522B2Publication Date: 2012-05-01
- Inventor: Michael Duhamel , Richard J. Pickreign
- Applicant: Michael Duhamel , Richard J. Pickreign
- Applicant Address: US MA Chelmsford
- Assignee: Brooks Automation, Inc.
- Current Assignee: Brooks Automation, Inc.
- Current Assignee Address: US MA Chelmsford
- Agency: Perman & Green, LLP
- Agent Richard Pickreign
- Main IPC: B65G15/08
- IPC: B65G15/08

Abstract:
A substrate transport apparatus comprising a drive mechanism, a movable arm assembly, and an end effector with an active edge gripper. The apparatus is configured to avoid the need to provide cables to the end effector for power or communication. In one aspect, the gripper is actuated when a motion sensor senses motion of the end effector. In another aspect, communication signals are wirelessly transferred to the end effector to control the active gripper. In another aspect, power is wirelessly transferred to the end effector to power actuation of the gripper.
Public/Granted literature
- US20060222480A1 Substrate transport apparatus with active edge gripper Public/Granted day:2006-10-05
Information query
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