Invention Grant
US08167522B2 Substrate transport apparatus with active edge gripper 有权
带主动边缘夹具的基板输送装置

Substrate transport apparatus with active edge gripper
Abstract:
A substrate transport apparatus comprising a drive mechanism, a movable arm assembly, and an end effector with an active edge gripper. The apparatus is configured to avoid the need to provide cables to the end effector for power or communication. In one aspect, the gripper is actuated when a motion sensor senses motion of the end effector. In another aspect, communication signals are wirelessly transferred to the end effector to control the active gripper. In another aspect, power is wirelessly transferred to the end effector to power actuation of the gripper.
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