Invention Grant
US08167981B2 Vacuum filter assembly 有权
真空过滤器总成

Vacuum filter assembly
Abstract:
A filter assembly for mechanically removing silicon monoxide during a crystal growth run having a filter housing, a filter mounting plate attached to the filter housing, a sweep plate attached to the filter housing, a plurality of filter elements attached to the filter mounting plate, and a plurality of ring-shaped brushes mounted to the sweep plate, wherein at least one of the plurality of ring-shaped brushes surrounds each of the plurality of filter elements. Alternatively, a filter assembly for mechanically removing silicon monoxide during a crystal growth run having a filter housing having a upper portion, a lower portion and a central portion, a filter mounting plate attached to the filter housing proximate the upper portion, a plurality of filter elements attached to the filter mounting plate, and a cylindrical brush mounted in the center portion of the filter housing, wherein the cylindrical brush has a plurality of bristles pointing radially outward, said bristles contacting an outer portion of the plurality of filter elements.
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