Invention Grant
- Patent Title: Device for clamping and positioning an evaporator boat
- Patent Title (中): 用于夹紧和定位蒸发器船的装置
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Application No.: US11996640Application Date: 2005-07-27
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Publication No.: US08168002B2Publication Date: 2012-05-01
- Inventor: Stefan Hein , Wolfgang Klein
- Applicant: Stefan Hein , Wolfgang Klein
- Applicant Address: DE Alzenau
- Assignee: Applied Materials GmbH & Co. KG
- Current Assignee: Applied Materials GmbH & Co. KG
- Current Assignee Address: DE Alzenau
- Agency: Patterson & Sheridan, L.L.P.
- International Application: PCT/EP2005/008154 WO 20050727
- International Announcement: WO2007/012342 WO 20070201
- Main IPC: C23C16/00
- IPC: C23C16/00

Abstract:
The invention relates to a vacuum treatment plant comprising an evaporator (1) for vacuum coating facilities. The evaporator (1) according to the invention comprises a device for guiding a supply line (4) movable in a gripping direction (A) and intended for gripping and positioning an evaporation boat (3) having a base (22) and further comprises two spacers (18, 19) which the movable supply line (4) flexibly connects to the base (22), with the spacers (18, 19) being disposed on one side each with the movable supply line (4) and with the other side on the base (22), thus enabling the first supply line (4) to be forcibly guided, and with the spacers (18, 19) having such a length and configuration between the first supply line (4) and the base (22) that the guidance direction (B) is essentially parallel to the gripping direction (A) at least across a small deflection range of the spacers (18, 19).
Public/Granted literature
- US20090199767A1 DEVICE FOR CLAMPING AND POSITIONING AN EVAPORATOR BOAT Public/Granted day:2009-08-13
Information query
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