Invention Grant
- Patent Title: Balancing pressure to improve a fluid seal
- Patent Title (中): 平衡压力以改善流体密封
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Application No.: US12790264Application Date: 2010-05-28
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Publication No.: US08168057B2Publication Date: 2012-05-01
- Inventor: Arthur Keigler , Qunwei Wu , Zhenqiu Liu , John Harrell
- Applicant: Arthur Keigler , Qunwei Wu , Zhenqiu Liu , John Harrell
- Applicant Address: US MA Billerica
- Assignee: NEXX Systems, Inc.
- Current Assignee: NEXX Systems, Inc.
- Current Assignee Address: US MA Billerica
- Agency: Perman & Green, LLP
- Main IPC: C25D5/02
- IPC: C25D5/02
Abstract:
A method of fluid sealing a workpiece is provided. The method includes providing a force to cause a ring to form a barrier to fluid entry with the workpiece and preventing fluid from crossing the barrier to fluid entry by forming a pressure differential across the barrier.
Public/Granted literature
- US20100301564A1 BALANCING PRESSURE TO IMPROVE A FLUID SEAL Public/Granted day:2010-12-02
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