Invention Grant
- Patent Title: Method for producing a mould for nanostructured polymer objects
- Patent Title (中): 用于生产纳米结构聚合物物体的模具的方法
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Application No.: US12588878Application Date: 2009-10-30
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Publication No.: US08168076B2Publication Date: 2012-05-01
- Inventor: Jerome Gavillet , Pierre Juliet
- Applicant: Jerome Gavillet , Pierre Juliet
- Applicant Address: FR Paris
- Assignee: Commissariat a l'Energie Atomique
- Current Assignee: Commissariat a l'Energie Atomique
- Current Assignee Address: FR Paris
- Agency: Oliff & Berridge, PLC
- Priority: FR0806143 20081104
- Main IPC: C03C15/00
- IPC: C03C15/00

Abstract:
A mould for objects made of polymer material is produced by successively depositing a barrier thin layer and a thin layer of diamond-like carbon on at least a part of a metal support. The thin layer of diamond-like carbon is then nanopatterned with a predetermined pattern presenting a form factor of more than 1. Nanopatterning is performed by selective chemical etching in dry phase through a hard mask and etching stops at an interface between the thin layer of diamond-like carbon and the barrier thin layer. The hard mask used was formed beforehand on a free surface of the thin layer of diamond-like carbon by selective chemical etching in dry phase performed through a void lattice delineated by nanoparticles deposited beforehand on a free surface of said hard mask. The barrier thin layer and the nanopatterned thin layer of diamond-like carbon form a bilayer coating presenting a thickness comprised between about 100 nm and about 10 μm.
Public/Granted literature
- US20100108638A1 Method for producing a mould for nanostructured polymer objects Public/Granted day:2010-05-06
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