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US08168109B2 Stabilizers for vinyl ether resist formulations for imprint lithography 有权
用于压印光刻的乙烯基醚抗蚀剂配方的稳定剂

Stabilizers for vinyl ether resist formulations for imprint lithography
Abstract:
Coating compositions suitable for UV imprint lithographic applications include at least one vinyl ether crosslinker having at least two vinyl ether groups; at least one diluent comprising a monofunctional vinyl ether compound; at least one photoacid generator soluble in a selected one or both of the at least one monofunctional vinyl ether compound and the at least one vinyl ether crosslinker having the at least two vinyl ether groups; and at least one stabilizer comprising an ester compound selectively substituted with a substituent at an ester position or an alpha and the ester positions. Also disclosed are imprint processes.
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