Invention Grant
US08168109B2 Stabilizers for vinyl ether resist formulations for imprint lithography
有权
用于压印光刻的乙烯基醚抗蚀剂配方的稳定剂
- Patent Title: Stabilizers for vinyl ether resist formulations for imprint lithography
- Patent Title (中): 用于压印光刻的乙烯基醚抗蚀剂配方的稳定剂
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Application No.: US12545161Application Date: 2009-08-21
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Publication No.: US08168109B2Publication Date: 2012-05-01
- Inventor: Frances A. Houle , Sally A. Swanson , Taiichi Furukawa
- Applicant: Frances A. Houle , Sally A. Swanson , Taiichi Furukawa
- Applicant Address: US NY Armonk JP
- Assignee: International Business Machines Corporation,JSR Corporation
- Current Assignee: International Business Machines Corporation,JSR Corporation
- Current Assignee Address: US NY Armonk JP
- Agency: Cantor Colburn LLP
- Main IPC: B29C35/08
- IPC: B29C35/08 ; B29C59/02 ; G03F7/004

Abstract:
Coating compositions suitable for UV imprint lithographic applications include at least one vinyl ether crosslinker having at least two vinyl ether groups; at least one diluent comprising a monofunctional vinyl ether compound; at least one photoacid generator soluble in a selected one or both of the at least one monofunctional vinyl ether compound and the at least one vinyl ether crosslinker having the at least two vinyl ether groups; and at least one stabilizer comprising an ester compound selectively substituted with a substituent at an ester position or an alpha and the ester positions. Also disclosed are imprint processes.
Public/Granted literature
- US20110042862A1 Stabilizers for Vinyl Ether Resist Formulations for Imprint Lithography Public/Granted day:2011-02-24
Information query
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