Invention Grant
US08168272B2 Storage container for photomask-forming synthetic quartz glass substrate
有权
用于光掩模成型合成石英玻璃基板的储存容器
- Patent Title: Storage container for photomask-forming synthetic quartz glass substrate
- Patent Title (中): 用于光掩模成型合成石英玻璃基板的储存容器
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Application No.: US12181710Application Date: 2008-07-29
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Publication No.: US08168272B2Publication Date: 2012-05-01
- Inventor: Mamoru Morikawa , Daijitsu Harada , Masaki Takeuchi
- Applicant: Mamoru Morikawa , Daijitsu Harada , Masaki Takeuchi
- Applicant Address: JP Tokyo
- Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Agent Shuji Yoshizaki
- Priority: JP2007-199626 20070731
- Main IPC: B65D81/00
- IPC: B65D81/00

Abstract:
A storage container for containing a photomask-forming synthetic quartz glass substrate comprises inner walls facing the front and back surfaces of the glass substrate, and reservoirs provided on the container inner walls for receiving an absorber for components outgassing from the container. A ratio A/B is in the range of 1.0-120 m2/cm2 provided that A is the product (m2) of the total weight (g) of the absorber multiplied by the BET specific surface area (m2/g) of the absorber and B is the total area (cm2) of the front and back surfaces of the glass substrate.
Public/Granted literature
- US20090035497A1 STORAGE CONTAINER FOR PHOTOMASK-FORMING SYNTHETIC QUARTZ GLASS SUBSTRATE Public/Granted day:2009-02-05
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