Invention Grant
US08168352B2 Reflective mask blank for EUV lithography and mask for EUV lithography
有权
用于EUV光刻的反射掩模板和用于EUV光刻的掩模
- Patent Title: Reflective mask blank for EUV lithography and mask for EUV lithography
- Patent Title (中): 用于EUV光刻的反射掩模板和用于EUV光刻的掩模
-
Application No.: US13004081Application Date: 2011-01-11
-
Publication No.: US08168352B2Publication Date: 2012-05-01
- Inventor: Kazuyuki Hayashi , Toshiyuki Uno , Ken Ebihara
- Applicant: Kazuyuki Hayashi , Toshiyuki Uno , Ken Ebihara
- Applicant Address: JP Tokyo
- Assignee: Asahi Glass Company, Limited
- Current Assignee: Asahi Glass Company, Limited
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2008-182439 20080714
- Main IPC: G03F1/00
- IPC: G03F1/00

Abstract:
Provision of an EUV mask whereby an influence of reflected light from a region outside a mask pattern region is suppressed, and an EUV mask blank to be employed for production of such an EUV mask.A reflective mask for EUV lithography (EUVL), comprising a substrate having a mask pattern region and an EUV light-absorbing region located outside the mask pattern region; a reflective layer provided on the mask pattern region of the substrate for reflecting EUV light and having a portion on which an absorber layer is present and a portion on which no absorber layer is present; the portion on which an absorber layer is present and the portion on which no absorber layer is present being arranged so as to constitute a mask pattern; wherein the reflectivity of a surface of the absorber layer for EUV light is from 5 to 15% and the reflectivity of a surface of the EUV light-absorbing region for EUV light is at most 1%.
Public/Granted literature
- US20110104595A1 REFLECTIVE MASK BLANK FOR EUV LITHOGRAPHY AND MASK FOR EUV LITHOGRAPHY Public/Granted day:2011-05-05
Information query