Invention Grant
- Patent Title: Display device and manufacturing method thereof, and semiconductor device and manufacturing method thereof
- Patent Title (中): 显示装置及其制造方法以及半导体装置及其制造方法
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Application No.: US13276907Application Date: 2011-10-19
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Publication No.: US08168484B2Publication Date: 2012-05-01
- Inventor: Iwao Yagi
- Applicant: Iwao Yagi
- Applicant Address: JP Tokyo
- Assignee: Sony Corporation
- Current Assignee: Sony Corporation
- Current Assignee Address: JP Tokyo
- Agency: SNR Denton US LLP
- Priority: JP2008-157489 20080617
- Main IPC: H01L21/84
- IPC: H01L21/84 ; H01L21/00 ; H01L21/4763

Abstract:
A method of forming a display device including source/drain electrodes on a substrate, a pixel electrode, an insulating partition wall layer, a channel-region semiconductor layer. The source/drain electrodes and the pixel electrode are formed on the substrate and in contact with each other. The insulating partition wall layer is formed on the substrate and provided with a first opening extending to between the source electrode and the drain electrode and a second opening formed on the pixel electrode and extending to the pixel electrode. The channel-region semiconductor layer is formed on the bottom of the first opening. The insulating film is formed on the partition wall layer so as to cover the first opening including the channel-region semiconductor layer. The oriented film covers the first opening from above the insulating film and the second opening from the pixel electrode.
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