Invention Grant
- Patent Title: Method for fabricating dual poly gate in semiconductor device
- Patent Title (中): 在半导体器件中制造双重多晶硅栅的方法
-
Application No.: US12648785Application Date: 2009-12-29
-
Publication No.: US08168491B2Publication Date: 2012-05-01
- Inventor: Il Cheol Rho
- Applicant: Il Cheol Rho
- Applicant Address: KR Icheon-si
- Assignee: Hynix Semiconductor Inc.
- Current Assignee: Hynix Semiconductor Inc.
- Current Assignee Address: KR Icheon-si
- Agency: Marshall, Gerstein & Borun LLP
- Priority: KR10-2009-0039454 20090506
- Main IPC: H01L21/8238
- IPC: H01L21/8238

Abstract:
A method for fabricating a dual poly gate in a semiconductor device, comprising: forming a gate insulation layer and a polysilicon layer on a semiconductor substrate that defines a first region and a second region; implanting first and second conductive type impurity ions into the first region and the second region of the polysilicon layer, respectively; forming first and second conductive type polysilicon layer in the first and second regions, respectively, by annealing the semiconductor substrate; forming a barrier metal layer on the first and second conductive type polysilicon layers; forming an oxide layer that lowers resistance of a metal by an oxidation process; forming a metal layer and a hard mask layer on the oxide layer; and forming a first conductive type poly gate on the first region and a second conductive type poly gate on the second region by a patterning process.
Public/Granted literature
- US20100285659A1 Method for Fabricating Dual Poly Gate in Semiconductor Device Public/Granted day:2010-11-11
Information query
IPC分类: