Invention Grant
- Patent Title: Trench MOS transistor and method of manufacturing the same
- Patent Title (中): 沟槽MOS晶体管及其制造方法
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Application No.: US12027655Application Date: 2008-02-07
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Publication No.: US08168494B2Publication Date: 2012-05-01
- Inventor: Tomomitsu Risaki , Jun Osanai
- Applicant: Tomomitsu Risaki , Jun Osanai
- Applicant Address: JP Chiba
- Assignee: Seiko Instruments Inc.
- Current Assignee: Seiko Instruments Inc.
- Current Assignee Address: JP Chiba
- Agency: Brinks Hofer Gilson & Lione
- Priority: JP2007-028294 20070207
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L29/78

Abstract:
Trench portions (10) are formed in a well (5) in order to provide unevenness in the well (5). A gate electrode (2) is formed via an insulating film (7) on the upper surface and inside of the trench portions (10). A source region (3) is formed on one side of the gate electrode (2) in a gate length direction while a drain region (4) on another side. Both of the source region (3) and the drain region (4) are formed down to near the bottom portion of the gate electrode (2). By deeply forming the source region (3) and the drain region (4), current uniformly flows through the whole trench portions (10), and the unevenness formed in the well (5) increase the effective gate width to decrease the on-resistance of a semiconductor device 1 and to enhance the drivability thereof.
Public/Granted literature
- US20080185639A1 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2008-08-07
Information query
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