Invention Grant
US08169003B2 Termination and contact structures for a high voltage GaN-based heterojunction transistor 有权
用于高电压GaN基异质结晶体管的端接和接触结构

Termination and contact structures for a high voltage GaN-based heterojunction transistor
Abstract:
A semiconductor device is provided that includes a substrate, a first active layer disposed over the substrate, and a second active layer disposed on the first active layer. The second active layer has a higher bandgap than the first active layer such that a two-dimensional electron gas layer arises between the first active layer and the second active layer. A termination layer, which is disposed on the second active layer, includes InGaN. Source, gate and drain contacts are disposed on the termination layer.
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