Invention Grant
- Patent Title: Asymmetric junction field effect transistor
- Patent Title (中): 非对称结场效应晶体管
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Application No.: US13037485Application Date: 2011-03-01
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Publication No.: US08169007B2Publication Date: 2012-05-01
- Inventor: Frederick G. Anderson , David S. Collins , Richard A. Phelps , Robert M. Rassel , Michael J. Zierak
- Applicant: Frederick G. Anderson , David S. Collins , Richard A. Phelps , Robert M. Rassel , Michael J. Zierak
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Richard M. Kotulak, Esq.
- Main IPC: H01L29/00
- IPC: H01L29/00 ; H01L29/76

Abstract:
A junction field effect transistor (JFET) in a semiconductor substrate includes a source region, a drain region, a channel region, an upper gate region, and a lower gate region. The lower gate region is electrically connected to the upper gate region. The upper and lower gate regions control the current flow through the channel region. By performing an ion implantation step that extends the thickness of the source region to a depth greater than the thickness of the drain region, an asymmetric JFET is formed. The extension of depth of the source region relative to the depth of the drain region reduces the length for minority charge carriers to travel through the channel region, reduces the on-resistance of the JFET, and increases the on-current of the JFET, thereby enhancing the overall performance of the JFET without decreasing the allowable Vds or dramatically increasing Voff/Vpinch.
Public/Granted literature
- US20110147808A1 ASYMMETRIC JUNCTION FIELD EFFECT TRANSISTOR Public/Granted day:2011-06-23
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