Invention Grant
- Patent Title: Interdigitated capacitive structure for an integrated circuit
- Patent Title (中): 用于集成电路的交叉电容结构
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Application No.: US11328502Application Date: 2006-01-09
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Publication No.: US08169014B2Publication Date: 2012-05-01
- Inventor: Yueh-You Chen , Chung-Long Chang , Chih-Ping Chao
- Applicant: Yueh-You Chen , Chung-Long Chang , Chih-Ping Chao
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater & Matsil, L.L.P.
- Main IPC: H01L29/92
- IPC: H01L29/92

Abstract:
System and method for an improved interdigitated capacitive structure for an integrated circuit. A preferred embodiment comprises a first layer of a sequence of substantially parallel interdigitated strips, each strip of either a first polarity or a second polarity, the sequence alternating between a strip of the first polarity and a strip of the second polarity. A first dielectric layer is deposited over each strip of the first layer of strips. A first extension layer of a sequence of substantially interdigitated extension strips is deposited over the first dielectric layer, each extension strip deposited over a strip of the first layer of the opposite polarity. A first sequence of vias is coupled to the first extension layer, each via deposited over an extension strip of the same polarity. A second layer of a sequence of substantially parallel interdigitated strips can be coupled to the first sequence of vias.
Public/Granted literature
- US20070158783A1 Interdigitated capacitive structure for an integrated circuit Public/Granted day:2007-07-12
Information query
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