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US08169044B2 Image sensor and method for manufacturing the same 有权
图像传感器及其制造方法

Image sensor and method for manufacturing the same
Abstract:
Embodiments provide an image sensor. The image sensor includes readout circuitry, an interlayer dielectric, an interconnection, and an image sensing device. The interconnection includes a lower barrier metal and a nitride barrier formed under the lower barrier metal. A contact plug electrically connecting the lower barrier metal to a lower interconnect is formed passing through the nitride barrier.
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