Invention Grant
- Patent Title: Image sensor and method for manufacturing the same
- Patent Title (中): 图像传感器及其制造方法
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Application No.: US12548997Application Date: 2009-08-27
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Publication No.: US08169044B2Publication Date: 2012-05-01
- Inventor: Ji Hoon Hong
- Applicant: Ji Hoon Hong
- Applicant Address: KR Seoul
- Assignee: Dongbu Hitek Co., Ltd.
- Current Assignee: Dongbu Hitek Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Saliwanchik, Lloyd & Eisenschenk
- Priority: KR10-2008-0089686 20080911
- Main IPC: H01L31/00
- IPC: H01L31/00

Abstract:
Embodiments provide an image sensor. The image sensor includes readout circuitry, an interlayer dielectric, an interconnection, and an image sensing device. The interconnection includes a lower barrier metal and a nitride barrier formed under the lower barrier metal. A contact plug electrically connecting the lower barrier metal to a lower interconnect is formed passing through the nitride barrier.
Public/Granted literature
- US20100059848A1 IMAGE SENSOR AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2010-03-11
Information query
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