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US08169076B2 Interconnect structures having lead-free solder bumps 有权
具有无铅焊料凸块的互连结构

Interconnect structures having lead-free solder bumps
Abstract:
An integrated circuit structure includes a semiconductor substrate, and a polyimide layer over the semiconductor substrate. An under-bump-metallurgy (UBM) has a first portion over the polyimide layer, and a second portion level with the polyimide layer. A first solder bump and a second solder bump are formed over the polyimide layer, with a pitch between the first solder bump and the second solder bump being no more than 150 μm. A width of the UBM equals one-half of the pitch plus a value greater than 5 μm.
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