Invention Grant
US08169824B2 Semiconductor device including contact plug having an elliptical sectional shape
有权
包括具有椭圆形截面形状的接触插头的半导体装置
- Patent Title: Semiconductor device including contact plug having an elliptical sectional shape
- Patent Title (中): 包括具有椭圆形截面形状的接触插头的半导体装置
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Application No.: US12699319Application Date: 2010-02-03
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Publication No.: US08169824B2Publication Date: 2012-05-01
- Inventor: Masato Endo , Itaru Kawabata , Shinichi Watanabe , Hiroyuki Nitta , Takuya Futatsuyama
- Applicant: Masato Endo , Itaru Kawabata , Shinichi Watanabe , Hiroyuki Nitta , Takuya Futatsuyama
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2009-026263 20090206
- Main IPC: G11C11/34
- IPC: G11C11/34
Abstract:
A semiconductor device includes a first MOS transistor, second MOS transistors, first contact plugs, and a second contact plug. The first MOS transistor with a first conductivity is formed on a semiconductor substrate. The second MOS transistors with a second conductivity are formed on the semiconductor substrate. The first contact plugs has a circular planar shape. The second contact plug has an elliptical planar shape and is formed on a source or a drain in one of the second MOS transistors. The first contact plugs are formed on sources or drains in the remaining second MOS transistors and the first MOS transistor.
Public/Granted literature
- US20100202208A1 SEMICONDUCTOR DEVICE INCLUDING CONTACT PLUG HAVING AN ELLIPTICAL SECTIONAL SHAPE Public/Granted day:2010-08-12
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