Invention Grant
- Patent Title: Method and system for automatic generation of throughput models for semiconductor tools
- Patent Title (中): 自动生成半导体工具吞吐量模型的方法和系统
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Application No.: US12400174Application Date: 2009-03-09
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Publication No.: US08170704B2Publication Date: 2012-05-01
- Inventor: Kilian Schmidt , Roy Boerner , Jan Lange
- Applicant: Kilian Schmidt , Roy Boerner , Jan Lange
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Williams, Morgan & Amerson
- Priority: DE102008016430 20080331; DE102008023906 20080516
- Main IPC: G06F19/00
- IPC: G06F19/00
Abstract:
The throughput of complex cluster tools of a semiconductor manufacturing environment may be determined for a desired manufacturing scenario on the basis of automatically generated throughput models. The throughput models may be established on the basis of rule messages with high statistical relevance.
Public/Granted literature
- US20090248189A1 METHOD AND SYSTEM FOR AUTOMATIC GENERATION OF THROUGHPUT MODELS FOR SEMICONDUCTOR TOOLS Public/Granted day:2009-10-01
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