Invention Grant
US08171618B1 Tunable pole trim processes for fabricating trapezoidal perpendicular magnetic recording (PMR) write poles 有权
用于制造梯形垂直磁记录(PMR)写入极的可调极修剪工艺

  • Patent Title: Tunable pole trim processes for fabricating trapezoidal perpendicular magnetic recording (PMR) write poles
  • Patent Title (中): 用于制造梯形垂直磁记录(PMR)写入极的可调极修剪工艺
  • Application No.: US12486706
    Application Date: 2009-06-17
  • Publication No.: US08171618B1
    Publication Date: 2012-05-08
  • Inventor: Lei WangGe Yi
  • Applicant: Lei WangGe Yi
  • Applicant Address: US CA Fremont
  • Assignee: Western Digital (Fremont), LLC
  • Current Assignee: Western Digital (Fremont), LLC
  • Current Assignee Address: US CA Fremont
  • Main IPC: G11B5/127
  • IPC: G11B5/127 H04R31/00
Tunable pole trim processes for fabricating trapezoidal perpendicular magnetic recording (PMR) write poles
Abstract:
A method of forming a write pole for a magnetic recording device is provided. The method comprises providing a layer of magnetic material covered with a secondary hard mask layer and a patterned primary hard mask, milling at a first milling angle to transfer a pattern from the patterned primary hard mask to the secondary hard mask, and milling at a second milling angle to transfer the pattern from the secondary hard mask to the layer of magnetic material to form the write pole. The second milling angle is greater than the first milling angle. The method further comprises milling at a third milling angle to adjust a side wall angle of the write pole to about a desired side wall angle, and milling at a fourth milling angle to reduce a track width of the write pole to a desired track width.
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