Invention Grant
US08171793B2 Systems and methods for detecting out-of-plane linear acceleration with a closed loop linear drive accelerometer 有权
用闭环线性驱动加速度计检测平面外线性加速度的系统和方法

Systems and methods for detecting out-of-plane linear acceleration with a closed loop linear drive accelerometer
Abstract:
Systems and methods sense out-of-plane linear accelerations. In an exemplary embodiment, the out-of plane linear accelerometer is accelerated in an out-of-plane direction, wherein the acceleration generates a rotational torque to an unbalanced proof mass. A rebalancing force is applied to at least one plurality of interleaved rotor comb tines and stator comb tines, wherein the rebalancing force opposes the rotational torque, wherein the rotor comb tines are disposed at an end of the unbalanced proof mass, and wherein the stator comb tines are disposed on a stator adjacent to the end of the unbalanced proof mass. An amount of acceleration is then determined based upon the applied rebalancing force.
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