Invention Grant
US08171794B2 Operating method and circuit arrangement for a capacitive micromechanical sensor with analog reset 失效
具有模拟复位功能的电容微机械传感器的操作方法和电路布置

  • Patent Title: Operating method and circuit arrangement for a capacitive micromechanical sensor with analog reset
  • Patent Title (中): 具有模拟复位功能的电容微机械传感器的操作方法和电路布置
  • Application No.: US12451879
    Application Date: 2008-03-14
  • Publication No.: US08171794B2
    Publication Date: 2012-05-08
  • Inventor: Guenter Spahlinger
  • Applicant: Guenter Spahlinger
  • Applicant Address: DE Freiburg
  • Assignee: Northrop Grumman LITEF GmbH
  • Current Assignee: Northrop Grumman LITEF GmbH
  • Current Assignee Address: DE Freiburg
  • Agent Elliot N. Kramsky
  • Priority: DE102007027652 20070615
  • International Application: PCT/EP2008/002059 WO 20080314
  • International Announcement: WO2008/151683 WO 20081218
  • Main IPC: G01P15/125
  • IPC: G01P15/125
Operating method and circuit arrangement for a capacitive micromechanical sensor with analog reset
Abstract:
A method and a switch arrangement for operating a micromechanical capacitive sensor having at least one and at most two fixed electrodes and one differential capacitor formed by a movable central electrode that can be deflected by an external force, wherein the deflection of the electrode is measured. A fraction of the force acting on the central electrode, corresponding to the electrostatic restorative force, is compensated. Under closed-loop operation, a selection signal is influenced by a regulator supplementing a restore crosstalk signal so that the created capacitive restorative force acts in a compensatory manner against deflection of the central electrode.
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