Invention Grant
US08171794B2 Operating method and circuit arrangement for a capacitive micromechanical sensor with analog reset
失效
具有模拟复位功能的电容微机械传感器的操作方法和电路布置
- Patent Title: Operating method and circuit arrangement for a capacitive micromechanical sensor with analog reset
- Patent Title (中): 具有模拟复位功能的电容微机械传感器的操作方法和电路布置
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Application No.: US12451879Application Date: 2008-03-14
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Publication No.: US08171794B2Publication Date: 2012-05-08
- Inventor: Guenter Spahlinger
- Applicant: Guenter Spahlinger
- Applicant Address: DE Freiburg
- Assignee: Northrop Grumman LITEF GmbH
- Current Assignee: Northrop Grumman LITEF GmbH
- Current Assignee Address: DE Freiburg
- Agent Elliot N. Kramsky
- Priority: DE102007027652 20070615
- International Application: PCT/EP2008/002059 WO 20080314
- International Announcement: WO2008/151683 WO 20081218
- Main IPC: G01P15/125
- IPC: G01P15/125

Abstract:
A method and a switch arrangement for operating a micromechanical capacitive sensor having at least one and at most two fixed electrodes and one differential capacitor formed by a movable central electrode that can be deflected by an external force, wherein the deflection of the electrode is measured. A fraction of the force acting on the central electrode, corresponding to the electrostatic restorative force, is compensated. Under closed-loop operation, a selection signal is influenced by a regulator supplementing a restore crosstalk signal so that the created capacitive restorative force acts in a compensatory manner against deflection of the central electrode.
Public/Granted literature
- US20100132466A1 OPERATING METHOD AND CIRCUIT ARRANGEMENT FOR A CAPACITIVE MICROMECHANICAL SENSOR WITH ANALOG RESET Public/Granted day:2010-06-03
Information query
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