Invention Grant
- Patent Title: Applicator and method for transferring dispersion liquid
- Patent Title (中): 涂布器和分散液转移方法
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Application No.: US12149133Application Date: 2008-04-28
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Publication No.: US08171876B2Publication Date: 2012-05-08
- Inventor: Takumi Namekawa , Kei Baba , Yuya Inoue , Masao Murata , Koji Hane , Robert D. Taff , Robert R. McKay , Ralph D. Fox
- Applicant: Takumi Namekawa , Kei Baba , Yuya Inoue , Masao Murata , Koji Hane , Robert D. Taff , Robert R. McKay , Ralph D. Fox
- Applicant Address: JP Chigasaki-shi
- Assignee: Ulvac, Inc.
- Current Assignee: Ulvac, Inc.
- Current Assignee Address: JP Chigasaki-shi
- Agency: Kratz, Quintos & Hanson, LLP
- Priority: JP2005-325990 20051110
- Main IPC: B05C5/02
- IPC: B05C5/02

Abstract:
The present invention provides applicators reducing generating bubble. Dispersion liquid is supplied while the pressure of a circulation tank on the delivery side is lower than the atmospheric pressure but higher than the pressure of the space in buffer tanks. The dispersion liquid in the discharge chambers is recovered while the pressure in a circulation tank serving as recovery destination is lower than the atmospheric pressure. Gas dissolution can be reduced because the dispersion liquid does not come into contact with gases at pressures higher than the atmospheric pressure and engulffing gas or deformation of solid microparticles can be avoided because no pump is used.
Public/Granted literature
- US20080210160A1 Applicator and method for transferring dispersion liquid Public/Granted day:2008-09-04
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