Invention Grant
- Patent Title: Maintenance system, substrate processing apparatus, remote operation unit and communication method
- Patent Title (中): 维护系统，基板处理装置，远程操作单元及通讯方式
-
Application No.: US12372347Application Date: 2009-02-17
-
Publication No.: US08171879B2Publication Date: 2012-05-08
- Inventor: Takuya Mori
- Applicant: Takuya Mori
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2002-247525 20020827
- Main IPC: B05C5/02
- IPC: B05C5/02
Abstract:
A substrate processing apparatus having various types of elements including a substrate carrier member for performing a substrate processing; and a control section in which a remote operation information transmitted from a remote control unit in a remote place through a communication network is provided only when there is an allow setting of a remote operation by a worker of the substrate processing apparatus with the safety of the remote operation work being confirmed, and the various types of elements are controlled based on the provided remote operation information.
Public/Granted literature
- US20090157214A1 MAINTENANCE SYSTEM, SUBSTRATE PROCESSING APPARATUS, REMOTE OPERATION UNIT AND COMMUNICATION METHOD Public/Granted day:2009-06-18
Information query
