Invention Grant
US08171964B2 Apparatus and method for opening/closing lid of closed container, gas replacement apparatus using same, and load port apparatus
有权
用于打开/关闭密闭容器盖的装置和方法，使用其的气体替换装置和装载端口装置
- Patent Title: Apparatus and method for opening/closing lid of closed container, gas replacement apparatus using same, and load port apparatus
- Patent Title (中): 用于打开/关闭密闭容器盖的装置和方法，使用其的气体替换装置和装载端口装置
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Application No.: US12402664Application Date: 2009-03-12
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Publication No.: US08171964B2Publication Date: 2012-05-08
- Inventor: Tsutomu Okabe
- Applicant: Tsutomu Okabe
- Applicant Address: JP Tokyo
- Assignee: TDK Corporation
- Current Assignee: TDK Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2008-082950 20080327
- Main IPC: H01L21/02
- IPC: H01L21/02
Abstract:
The invention provides a purge apparatus that purges the gas in the interior of a FOUP with a high purging efficiency and an apparatus for opening/closing the lid of a FOUP for use in the purge apparatus. The purge apparatus has a cabinet having an opening portion through with the lid of the FOUP can pass, a door that can close the opening portion and hold the lid, and a gas supply nozzle provide in the cabinet. In this apparatus, a seal member is provided in such a way as to surround an element that is provided on the surface of the door and adapted to actuate a latch mechanism of the lid. The seal member spatially separates the element that is adapted to actuate the latch mechanism from the external space in a state in which the door is holding the lid.
Public/Granted literature
Information query
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