Invention Grant
US08172063B2 Substrate transporting apparatus and substrate guide unit for use therein 有权
基板输送装置及基板引导装置

  • Patent Title: Substrate transporting apparatus and substrate guide unit for use therein
  • Patent Title (中): 基板输送装置及基板引导装置
  • Application No.: US12077526
    Application Date: 2008-03-19
  • Publication No.: US08172063B2
    Publication Date: 2012-05-08
  • Inventor: Soon-Gyu Ho
  • Applicant: Soon-Gyu Ho
  • Applicant Address: KR Chungcheongnam-do
  • Assignee: Semes Co., Ltd.
  • Current Assignee: Semes Co., Ltd.
  • Current Assignee Address: KR Chungcheongnam-do
  • Agency: Jenkins, Wilson, Taylor & Hunt, P.A.
  • Priority: KR10-2007-0046602 20070514
  • Main IPC: B65G13/00
  • IPC: B65G13/00
Substrate transporting apparatus and substrate guide unit for use therein
Abstract:
An apparatus for transporting substrates and a guide unit are disclosed herein. A guide unit can prevent a substrate from shaking in a side direction when the substrate is transported by the rotation of a transporting roller. The guide unit includes an inner ring and an outer ring. The outer ring includes a ring-shaped guide protruding from an outer circumferential surface of the outer ring in a side direction. The outer circumferential surface of the outer ring comes in contact with the bottom edge of a substrate to support the substrate, and a side surface of the guide comes in contact with the side of the substrate to prevent the substrate from traveling in a side direction. The inner ring rotates with the shaft, and the outer ring rotates by a friction force with the substrate.
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