Invention Grant
- Patent Title: Substrate transporting apparatus and substrate guide unit for use therein
- Patent Title (中): 基板输送装置及基板引导装置
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Application No.: US12077526Application Date: 2008-03-19
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Publication No.: US08172063B2Publication Date: 2012-05-08
- Inventor: Soon-Gyu Ho
- Applicant: Soon-Gyu Ho
- Applicant Address: KR Chungcheongnam-do
- Assignee: Semes Co., Ltd.
- Current Assignee: Semes Co., Ltd.
- Current Assignee Address: KR Chungcheongnam-do
- Agency: Jenkins, Wilson, Taylor & Hunt, P.A.
- Priority: KR10-2007-0046602 20070514
- Main IPC: B65G13/00
- IPC: B65G13/00

Abstract:
An apparatus for transporting substrates and a guide unit are disclosed herein. A guide unit can prevent a substrate from shaking in a side direction when the substrate is transported by the rotation of a transporting roller. The guide unit includes an inner ring and an outer ring. The outer ring includes a ring-shaped guide protruding from an outer circumferential surface of the outer ring in a side direction. The outer circumferential surface of the outer ring comes in contact with the bottom edge of a substrate to support the substrate, and a side surface of the guide comes in contact with the side of the substrate to prevent the substrate from traveling in a side direction. The inner ring rotates with the shaft, and the outer ring rotates by a friction force with the substrate.
Public/Granted literature
- US20080286084A1 Substrate transporting apparatus and substrate guide unit for use therein Public/Granted day:2008-11-20
Information query
IPC分类: