Invention Grant
- Patent Title: Fast-acting pneumatic diaphragm valve
- Patent Title (中): 快速气动隔膜阀
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Application No.: US11456044Application Date: 2006-07-06
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Publication No.: US08172197B2Publication Date: 2012-05-08
- Inventor: Youfan Gu , Sven Nuesken
- Applicant: Youfan Gu , Sven Nuesken
- Applicant Address: US MA Andover
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Andover
- Agency: Cochran Freund & Young LLC
- Agent James R. Young
- Main IPC: F16K31/12
- IPC: F16K31/12

Abstract:
A fast-acting, pneumatic diaphragm valve includes a diaphragm valve closure member, a pneumatic piston that provides a closure force on the closure member, and a solenoid pilot valve that controls pressurized air to the piston to cause the piston to move in a reciprocal manner so that the closure member opens and closes the valve. The valve seat seal can be elastomer for enhancing speed, and the solenoid pilot valve can be positioned and configured with air flow longitudinally through or past the solenoid armature to enhance speed.
Public/Granted literature
- US20080023661A1 FAST-ACTING PNEUMATIC DIAPHRAGM VALVE Public/Granted day:2008-01-31
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