Invention Grant
- Patent Title: Substrate transport apparatus and substrate transport method
- Patent Title (中): 基板输送装置和基板输送方法
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Application No.: US12619873Application Date: 2009-11-17
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Publication No.: US08172291B2Publication Date: 2012-05-08
- Inventor: Hiroyasu Hebiishi
- Applicant: Hiroyasu Hebiishi
- Applicant Address: JP Tokyo
- Assignee: Olympus Corporation
- Current Assignee: Olympus Corporation
- Current Assignee Address: JP Tokyo
- Agency: Holtz, Holtz, Goodman & Chick, PC
- Priority: JP2008-307375 20081202
- Main IPC: A47J45/00
- IPC: A47J45/00
Abstract:
A substrate transport apparatus includes: a pair of arm units having a substrate-carrying surface on which a substrate is placed; a support member freely rotatably supporting the arm unit; and an inclination device inclining the arm unit with each of the substrate-carrying surface facing one another.
Public/Granted literature
- US20100135761A1 SUBSTRATE TRANSPORT APPARATUS AND SUBSTRATE TRANSPORT METHOD Public/Granted day:2010-06-03
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