Invention Grant
- Patent Title: Operation control device for vacuum pump and method for stopping operation thereof
- Patent Title (中): 真空泵操作控制装置及其停止操作方法
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Application No.: US12249285Application Date: 2008-10-10
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Publication No.: US08172544B2Publication Date: 2012-05-08
- Inventor: Koichi Kido , Tetsuro Sugiura , Hiroki Furuta
- Applicant: Koichi Kido , Tetsuro Sugiura , Hiroki Furuta
- Applicant Address: JP Tokyo
- Assignee: Ebara Corporation
- Current Assignee: Ebara Corporation
- Current Assignee Address: JP Tokyo
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2007-267032 20071012
- Main IPC: F04B49/00
- IPC: F04B49/00

Abstract:
To provide an operation control device for a vacuum pump and a method for stopping the operation of the vacuum pump that make it possible to effectively remove products, resulting from solidification and liquefaction of gas in a casing and possibly hindering the rotation of a pump rotor, so that the vacuum pump may be started normally. An operation control device 10 for a vacuum pump having a pump rotor 1 disposed in a casing 2 for free rotation includes a pump rotor control section 15 for controlling the rotation of the pump rotor 1. The pump rotor control section 15 has a function to, after a pump stop action has been taken, rotate the pump rotor 1 in forward and/or reverse directions according to a predetermined timing pattern and then stop the pump rotor 1.
Public/Granted literature
- US20090097984A1 OPERATION CONTROL DEVICE FOR VACUUM PUMP AND METHOD FOR STOPPING OPERATION THEREOF Public/Granted day:2009-04-16
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