Invention Grant
- Patent Title: Chemical-mechanical planarization pad
- Patent Title (中): 化学机械平面化垫
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Application No.: US12347734Application Date: 2008-12-31
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Publication No.: US08172648B2Publication Date: 2012-05-08
- Inventor: Paul Lefevre , Oscar K. Hsu , Marc C. Jin , John Erik Aldeborgh , David Adam Wells
- Applicant: Paul Lefevre , Oscar K. Hsu , Marc C. Jin , John Erik Aldeborgh , David Adam Wells
- Applicant Address: US MA Wilmington
- Assignee: Innopad, Inc.
- Current Assignee: Innopad, Inc.
- Current Assignee Address: US MA Wilmington
- Agency: Grossman, Tucker, Perreault & Pfleger, PLLC
- Main IPC: B24B1/00
- IPC: B24B1/00 ; B24D11/00

Abstract:
The present disclosure relates to a polishing pad including a chemical agent present in an amount sufficient to be released and dissolving into an aqueous abrasive particle polishing medium during chemical mechanical planarization and reducing abrasive particle agglomeration and a binder. The pad includes a surface such that as the pad is abraded the surface is renewed exposing at least a portion of the chemical agent.
Public/Granted literature
- US20090170410A1 CHEMICAL-MECHANICAL PLANARIZATION PAD Public/Granted day:2009-07-02
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