Invention Grant
US08172648B2 Chemical-mechanical planarization pad 有权
化学机械平面化垫

Chemical-mechanical planarization pad
Abstract:
The present disclosure relates to a polishing pad including a chemical agent present in an amount sufficient to be released and dissolving into an aqueous abrasive particle polishing medium during chemical mechanical planarization and reducing abrasive particle agglomeration and a binder. The pad includes a surface such that as the pad is abraded the surface is renewed exposing at least a portion of the chemical agent.
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