Invention Grant
US08172942B2 Arc discharge apparatus, apparatus and method for manufacturing vitreous silica glass crucible, and method for pulling up silicon single crystal
有权
电弧放电装置,玻璃石英玻璃坩埚的制造装置及其制造方法以及提高硅单晶的方法
- Patent Title: Arc discharge apparatus, apparatus and method for manufacturing vitreous silica glass crucible, and method for pulling up silicon single crystal
- Patent Title (中): 电弧放电装置,玻璃石英玻璃坩埚的制造装置及其制造方法以及提高硅单晶的方法
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Application No.: US12253500Application Date: 2008-10-17
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Publication No.: US08172942B2Publication Date: 2012-05-08
- Inventor: Masanori Fukui , Koichi Suzuki , Takeshi Fujita
- Applicant: Masanori Fukui , Koichi Suzuki , Takeshi Fujita
- Applicant Address: JP Akita-Ken JP Tokyo
- Assignee: Japan Super Quartz Corporation,Sumco Corporation
- Current Assignee: Japan Super Quartz Corporation,Sumco Corporation
- Current Assignee Address: JP Akita-Ken JP Tokyo
- Agency: Greenblum & Bernstein, P.L.C.
- Main IPC: C30B11/00
- IPC: C30B11/00 ; C30B15/00 ; C30B21/06 ; C30B27/02 ; C30B28/10 ; C30B30/04 ; C30B17/00 ; C30B21/02 ; C30B28/06 ; C30B35/00

Abstract:
The arc discharge apparatus comprises a plurality of carbon electrodes connected to respective phases of a power supply for heating a silica powder and causing it to fuse by generating arc discharge between the carbon electrodes. All of the carbon electrodes have a density in a range from 1.30 g/cm3 to 1.80 g/cm3, and variability in density among the carbon electrodes is 0.2 g/cm3 or less. The carbon particles that constitute the carbon electrodes preferably have a particle diameter of 0.3 mm or less.
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