Invention Grant
- Patent Title: High-purity vitreous silica crucible for pulling large-diameter single-crystal silicon ingot
- Patent Title (中): 用于拉大直径单晶硅锭的高纯硅石坩埚
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Application No.: US12325014Application Date: 2008-11-28
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Publication No.: US08172945B2Publication Date: 2012-05-08
- Inventor: Atushi Shimazu
- Applicant: Atushi Shimazu
- Applicant Address: JP Akita-Shi
- Assignee: Japan Super Quartz Corporation
- Current Assignee: Japan Super Quartz Corporation
- Current Assignee Address: JP Akita-Shi
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JPP2007-323419 20071214
- Main IPC: C30B15/10
- IPC: C30B15/10

Abstract:
A high-purity vitreous silica crucible used for pulling a large-diameter single-crystal silicon ingot, includes a double layered structure constituted by an outer layer composed of high-purity amorphous vitreous silica with a bubble content of 1 to 10% and a purity of 99.99% or higher, and an inner layer composed of high-purity amorphous vitreous silica s with a bubble content of 0.6% or less and a purity of 99.99% or higher, wherein, at least for an inner surface of the vitreous silica crucible between ingot-pulling start line and ingot-pulling end line of a silicon melt surface, a longitudinal section of the inner surface is shaped into a waveform, and depth and width of the ring grooves constituting the multi ring-groove patterned face are set in the range of 0.5 to 2 mm and 10 to 100 mm, respectively.
Public/Granted literature
- US20090151624A1 HIGH-PURITY VITREOUS SILICA CRUCIBLE FOR PULLING LARGE-DIAMETER SINGLE-CRYSTAL SILICON INGOT Public/Granted day:2009-06-18
Information query
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